Tools

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003 WaSeSS;

005 20210912081211.0;

006 m d ;

007 cr n ;

008 100820s2011 nyua sb 001 0 eng d;

010 a| 2010033078;

020 a| 9781617618376 (hardcover);

020 z| 9781611221237q| ebook;

035 a| (WaSeSS)ssj0000523915;

040 a| DLCc| DLCd| DLCd| WaSeSS;

042 a| pcc;

049 a| EREEa| NEHH;

050 00 a| TK7872.M3b| L58 2011;

082 00 a| 621.3815/312| 22;

245 00 a| Lithographyh| [electronic resource] :b| principles, processes and materials /c| Theodore C. Hennessy, editor.;

260 a| New York :b| Nova Science,;

300 a| xii, 284 p. :b| ill. (some col.) ;c| 27 cm.;

490 0 a| Engineering tools, techniques and tables;

490 0 a| Nanotechnology science and technology;

500 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Microlithography.=| ^A835808;

650 0 a| Microfabrication.=| ^A868305;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Hennessy, Theodore C.?| UNAUTHORIZED;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=3018148;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 5696579;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5696579-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 9/19/2021x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5696579-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 9/19/2021x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5696579-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 9/19/2021x| EBOOKz| JERESOURCE;

Lithography principles, processes and materials / Theodore C. Hennessy, editor.

Other author	Hennessy, Theodore C.
Format	Electronic
Publication Info	New York : Nova Science,
Description	xii, 284 p. : ill. (some col.) ; 27 cm.
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Microlithography. Microfabrication.

Series	Engineering tools, techniques and tables Nanotechnology science and technology
General note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2010033078
ISBN	9781617618376 (hardcover)
ISBN	ebook

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Lithography principles, processes and materials / Theodore C. Hennessy, editor.

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