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010 a| 2009044341;

020 a| 9781608764747 (hardcover : alk. paper);

020 z| 9781613246986 (pdf);

035 a| (WaSeSS)ssj0000854414;

040 a| DLCc| DLCd| DLCd| WaSeSS;

049 a| EREEa| NEHH;

050 00 a| TK7875b| .M5284 2010;

082 00 a| 6212| 22;

245 00 a| Micro electro mechanical systems (MEMS)h| [electronic resource] :b| technology, fabrication processes, and applications /c| editors, Britt Ekwall and Mikkel Cronquist.;

260 a| Hauppauge, N.Y. :b| Nova Science Publishers,;

300 a| xii, 391 p. :b| ill. (some col.) ;c| 27 cm.;

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Microelectromechanical systems.=| ^A424252;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Ekwall, Britt.?| UNAUTHORIZED;

700 1 a| Cronquist, Mikkel.?| UNAUTHORIZED;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=3019660;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 5698980;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5698980-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 9/19/2021x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5698980-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 9/19/2021x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5698980-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 9/19/2021x| EBOOKz| JERESOURCE;

Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications / editors, Britt Ekwall and Mikkel Cronquist.

Other author	Ekwall, Britt.
Other author	Cronquist, Mikkel.
Format	Electronic
Publication Info	Hauppauge, N.Y. : Nova Science Publishers,
Description	xii, 391 p. : ill. (some col.) ; 27 cm.
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Microelectromechanical systems.

Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2009044341
ISBN	9781608764747 (hardcover : alk. paper)

Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications / editors, Britt Ekwall and Mikkel Cronquist.

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