Fundamentals of semiconductor processing technology / by Badih El-Kareh ; graphics and layout, Richard J. Bombard.
| Author/creator | El-Kareh, Badih |
| Format | Book |
| Publication Info | Boston : Kluwer Academic Publishers, ©1995. |
| Description | xii, 599 pages : illustrations ; 25 cm |
| Subjects |
| General note | Cover title: Fundamentals of semiconductor processing technologies. |
| Bibliography note | Includes bibliographical references and index. |
| Other title | Fundamentals of semiconductor processing technologies. |
| LCCN | 94037113 |
| ISBN | 0792395344 (acid-free paper) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | General Stacks | TK7871.85 .E45 1995 | ✔ Available | Place Hold |