Fundamentals of semiconductor processing technology / by Badih El-Kareh ; graphics and layout, Richard J. Bombard.

Author/creator El-Kareh, Badih
Format Book
Publication InfoBoston : Kluwer Academic Publishers, ©1995.
Descriptionxii, 599 pages : illustrations ; 25 cm
Subjects

General noteCover title: Fundamentals of semiconductor processing technologies.
Bibliography noteIncludes bibliographical references and index.
Other titleFundamentals of semiconductor processing technologies.
LCCN 94037113
ISBN0792395344 (acid-free paper)

Availability

Library Location Call Number Status Item Actions
Joyner General Stacks TK7871.85 .E45 1995 ✔ Available Place Hold