Handbook of cleaning for semiconductor manufacturing fundamentals and applications / [edited by] Karen A. Reinhardt, Richard F. Reidy.
| Other author | Reinhardt, Karen A. |
| Other author | Reidy, Richard F., 1960- |
| Format | Electronic |
| Publication Info | Salem, Mass. : Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., |
| Description | xxii, 590 p. : ill. ; 26 cm. |
| Supplemental Content | Full text available from Ebook Central - Academic Complete |
| Subjects |
| Contents | Fundamentals. Surface and Colloidal Chemical Aspects of Wet Cleaning / Srini Raghavan, Manish Keswani, Nandini Venkataraman -- The Chemistry of Wet Cleaning / D. Martin Knotter -- The Chemistry of Wet Etching / D. Martin Knotter -- Surface Phenomena: Rinsing and Drying / Karen A. Reinhardt, Richard F. Reidy, John A. Marsella -- Fundamental Design of Chemical Formulations / Robert J. Rovito, Michael B. Korzenski, Ping Jiang, Karen A. Reinhardt -- Filtering, Recirculating, Reuse, and Recycling of Chemicals / Barry Gotlinsky, Kevin T. Pate, Donald C. Grant -- Applications. Cleaning Challenges of High-k/Metal Gate Structures / Muhammad M. Hussain, Denis Shamiryan, Vasile Paraschiv, Kenichi Sano, Karen A. Reinhardt -- High Dose Implant Stripping / Karen A. Reinhardt, Michael B. Korzenski -- Aluminum Interconnect Cleaning and Drying / David J. Maloney -- Low-k/Cu Cleaning and Drying / Karen A. Reinhardt, Richard F. Reidy, Jerome Daviot -- Corrosion and Passivation of Copper / Darryl W. Peters -- Germanium Surface Conditioning and Passivation / Sonja Sioncke, Yves J. Chabal, Martin M. Frank -- Wafer Reclaim / Michael B. Korzenski, Ping Jiang -- Direct Wafer Bonding Surface Conditioning / Hubert Moriceau, Yannick C. Le Tiec, Frank Fournel, Ludovic F. L. Ecarnot, Sebastien L. E. Kerdil̈s, Daniel Delprat, Christophe Maleville -- New Directions. Novel Analytical Methods for Cleaning Evaluation / Chris M. Sparks, Alain C. Diebold -- Stripping and Cleaning for Advanced Photolithography Applications / John A. Marsella, Dana L. Durham, Leslie D. Molnar. |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2011275120 |
| ISBN | 9780470625958 |
| ISBN | 0470625953 |
| ISBN | 9781118071748 (electronic bk.) |
| ISBN | 1118071743 (electronic bk.) |