Quantitative data processing in scanning probe microscopy SPM applications for nanometrology / Petr Klapetek.

Author/creator Klapetek, Petr
Format Electronic
EditionSecond edition.
Publication InfoAmsterdam, Netherlands : Elsevier, [2018]
Descriptionxviii, 397 pages : illustrations; 24 cm.
Supplemental ContentFull text available from eBook - Materials Science 2018
Subjects

SeriesMicro & nano technologies series
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2017962466
ISBN9780128133477 (pbk.)
ISBN0128133473 (pbk.)