2015 International Conference on Microelectronic Test Structures (ICMTS)
| Author/creator | IEEE Staff |
| Other author | IEEE Xplore (Online service) |
| Format | Electronic |
| Publication Info | Piscataway : IEEE |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Subjects |
| Summary | Annotation The Conference presents new developments in test structures, their implementation, and or application in the fields of silicon, compound semiconductor, nanotechnology, and MEMS research, including their implementation and applications, as well as test structures aimed at the characterization of new materials and devices |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| ISBN | 9781479983056 |
| ISBN | 1479983055 (Spiral) Active Record |
| Stock number | 00066573 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |