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010 a| 2015027790;

020 a| 9781119055495 (epub);

020 a| 9781119055433 (pdf);

020 z| 9781119055426 (cloth);

035 a| (WaSeSS)ssj0001556375;

042 a| pcc;

049 a| EREEa| NEHH;

050 00 a| TK7875;

082 00 a| 621.3812| 23;

100 1 a| Castañer, Luis.=| ^A1309163;

245 10 a| Understanding MEMSh| [electronic resource] :b| principles and applications /c| Luis Castañer.;

260 a| Chichester, UK ;a| Hoboken, New Jersey :b| Wiley,c| 2015.;

300 a| 1 online resource.;

504 a| Includes bibliographical references and index.;

505 0 a| Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

588 a| Description based on print version record and CIP data provided by publisher.;

650 0 a| Microelectromechanical systems.=| ^A424252;

655 0 a| Electronic books.=| ^A491897;

776 08 i| Print version:a| Castañer, Luis, author.t| Understanding MEMSd| Chichester, UK ; Hoboken, New Jersey : John Wiley & Sons, 2015z| 9781119055426w| (DLC) 2015024280;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=7104387;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

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998 a| 5927969;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5927969-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 10/14/2022x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5927969-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 10/14/2022x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5927969-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 10/14/2022x| EBOOKz| JERESOURCE;

Understanding MEMS principles and applications / Luis Castañer.

Author/creator	Castañer, Luis
Format	Electronic
Publication Info	Chichester, UK ; Hoboken, New Jersey : Wiley, 2015.
Description	1 online resource.
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Microelectromechanical systems.

Contents	Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Source of description	Description based on print version record and CIP data provided by publisher.
Issued in other form	Print version: Castañer, Luis, author. Understanding MEMS Chichester, UK ; Hoboken, New Jersey : John Wiley & Sons, 2015 9781119055426
Genre/form	Electronic books.
LCCN	2015027790
ISBN	9781119055495 (epub)
ISBN	9781119055433 (pdf)

Understanding MEMS principles and applications / Luis Castañer.

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