Developments in surface contamination and cleaning fundamentals and applied aspects / edited by Rajiv Kohli and K. L. Mittal.

Other author Kohli, Rajiv, 1947-
Other author Mittal, K. L., 1945-
Format Electronic
EditionSecond edition.
Publication InfoAmsterdam [Netherlands] ; San Diego, CA : William Andrew, [2016]
Descriptionxxii, 873 pages : illustrations ; 23 cm.
Supplemental ContentFull text available from eBook - Materials Science 2015 [EBCMS15]
Subjects

SeriesDevelopments in Surface Contamination and Cleaning Series ; volume 1
Contents The Physical Nature of Very, Very Small Particles and its Impact on their Behavior / Othmar Preining -- Transport and Deposition of Aerosol Particles / Daniel J. Rader and Anthony S. Geller -- Relevance of Particle Transport in Surface Deposition and Cleaning / Chao-Hsin Lin and Chao Zhu -- Aspects of Particle Adhesion and Removal / David J. Quesnel, Donald S. Rimai, David M. Schaefer, Stephen P. Beaudoin, Aaron Harrison, Darby Hoss, Melissa Sweat, and Myles Thomas -- Tribological Implication of Particles / Koji Kato -- ESD Controls in Cleanroom Environments : Relevance to Particle Deposition / Larry Levit and Arnold Steinman -- Airborne Molecular Contamination : Contamination on Substrates and the Environment in Semiconductors and Other Industries / Taketoshi Fujimoto, Kikuo Takeda, and Tatsuo Nonaka -- Surface Analysis Methods for Contaminant Identification / David A. Cole, Sachin Attavar, and Lei Zhang -- Electron Microscopy Techniques for Imaging and Analysis of Nanoparticles / Zhong Lin Wang and Jean L. Lee -- Wettability Techniques to Monitor the Cleanliness of Surfaces / Darren L. Williams and Kashmiri L. Mittal -- Cleaning with Solvents / John B. Durkee -- Removal of Particles by Chemical Cleaning / Philip G. Clark and Thomas J. Wagener -- The Use of Surfactants to Enhance Particle Removal from Surfaces / Michael L. Free -- Microabrasive Technology for Precision Cleaning and Processing / Rajiv Kohli -- Cleaning Using High-Speed Impinging Jet / Kuniaki Gotoh -- Carbon Dioxide Snow Cleaning / Robert Sherman -- Cleaning Using Argon/Nitrogen Cryogenic Aerosols / Wayne T. McDermott and Jeffery W. Butterbaugh -- Coatings for Prevention or Deactivation of Biological Contaminants / Joerg C. Tiller -- A Detailed Study of Semiconductor Wafer Drying / Wim Fyen, Frank Holsteyns, Twan Bearda, Sophia Arnauts, Jan Van Steenbergen, Geert Doumen, Karine Kenis, and Paul W. Mertens.
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2016461234
ISBN9780323299602

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