ASMC ... proceedings / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Author/creator IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
Format Electronic
Publication InfoNew York, NY : IEEE, ℗♭1990-
Supplemental ContentClick here for full text
Subjects

Other author/creatorInstitute of Electrical and Electronics Engineers. https://id.oclc.org/worldcat/entity/E39QH7JmppbjgFY6j8mDDMWwRg.
Other author/creatorSemiconductor Equipment and Materials International. https://id.oclc.org/worldcat/entity/E39QQPVp7Wj8pXFcbFwqH3wytg.
Other author/creatorIEEE Electron Devices Society. https://id.oclc.org/worldcat/entity/E39QQPVp7TBrDkHvVrTHg9Kvgg.
Other author/creatorIEEE Components, Hybrids, and Manufacturing Technology Society. https://id.oclc.org/worldcat/entity/E39QH7JmpvGC6dqrmgdwXYcQ3F.
Other author/creatorIEEE Xplore (Online service)
Uniform titleASMC ... proceedings (Online)
Other title Proceedings
Variant title Advanced Semiconductor Manufacturing Conference and Workshop
FrequencyAnnual
General noteSome issues have also a distinctive theme title.
General noteImprint varies.
Access restrictionAvailable only to authorized users.
Other formsAlso available in print.
Technical detailsMode of access: World Wide Web.
Issuing bodySponsored by: Semiconductor Equipment and Materials International and the IEEE Electron Devices Society (1990-199 with the IEEE Components, Hybrids & Manufacturing Technology Society).
Source of description2nd (1991); title from PDF cover image (IEEE Xplore, viewed December 17, 2014).
Source of description25th (2014); IEEE Xplore, viewed December 17, 2014).
Issued in other formPrint version: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC ... proceedings 1078-8743
Genre/formElectronic journals.
LCCN 2014203916
ISSN2376-6697 1078-8743

Availability

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Electronic Resources Access Content Online ✔ Available