Fundamentals of microelectromechanical systems (MEMS) / Eun Sok Kim.
| Author/creator | Kim, Eun Sok |
| Format | Electronic |
| Publication Info | New York : McGraw Hill, [2021] |
| Description | xviii, 396 pages : illustrations ; 25 cm |
| Supplemental Content | Full text available from AccessEngineering |
| Subjects |
| General note | Minimal Level Cataloging Plus. |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2021935774 |
| ISBN | 9781264257584 (hardcover) |
| ISBN | (ebook) |