New approaches to image processing based failure analysis of nano-scale ULSI devices / Zeev Zalevsky, Pavel Livshits, Eran Gur.
| Author/creator | Zalevsky, Zeev |
| Other author | Livshits, Pavel. |
| Other author | Gur, Eran. |
| Format | Electronic |
| Publication Info | Amsterdam : Elsevier/William Andrew, [2014]. |
| Description | 101 pages : illustrations ; 23 cm |
| Supplemental Content | Full text available from eBook - Engineering 2013 |
| Subjects |
| Series | Micro and Nano Technologies Series Micro & nano technologies. ^A1060517 |
| Abstract | New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise. |
| Bibliography note | Includes bibliographical references. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2012276394 |
| ISBN | 9780323241434 |
| ISBN | 0323241433 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |