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245 00 a| Handbook of VLSI microlithographyh| [electronic resource] :b| principles, technology, and applications /c| edited by John Helbert.;

250 a| 2nd ed.;

260 a| Norwich, NY :b| Noyes Publications/William Andrew Pub.,;

300 a| xxi, 1001 p. :b| ill. ;c| 24 cm.;

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Integrated circuitsx| Very large scale integration.=| ^A144311;

650 0 a| Microlithography.=| ^A835808;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Helbert, John N.=| ^A979069;

856 40 z| Full text available from William Andrew Supplement: Complete 1995 - 2006u| https://go.openathens.net/redirector/ecu.edu?url=http%3A%2F%2Fwww.sciencedirect.com%2Fscience%2Fbook%2F9780815514442;

856 40 z| Full text available from eBook - Engineering pre-2007u| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fwww.sciencedirect.com%2Fscience%2Fbook%2F9780815514442;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 6593485;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6593485-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 7/17/2025x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6593485-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 7/17/2025x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6593485-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 7/17/2025x| EBOOKz| JERESOURCE;

Handbook of VLSI microlithography principles, technology, and applications / edited by John Helbert.

Other author	Helbert, John N.
Format	Electronic
Edition	2nd ed.
Publication Info	Norwich, NY : Noyes Publications/William Andrew Pub.,
Description	xxi, 1001 p. : ill. ; 24 cm.
Supplemental Content	Full text available from William Andrew Supplement: Complete 1995 - 2006
Supplemental Content	Full text available from eBook - Engineering pre-2007
Subjects	Integrated circuits--Very large scale integration. Microlithography.

Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	00028173
ISBN	0815514441

Handbook of VLSI microlithography principles, technology, and applications / edited by John Helbert.

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