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010 a| 2005023492;

020 a| 0815514972 (William Andrew : alk. paper);

020 a| 3540211179 (Springer-Verlag);

035 a| (WaSeSS)ssj0000072509;

042 a| pcc;

049 a| EREEa| NEHH;

050 00 a| TK7875b| .M42 2006;

082 00 a| 6212| 22;

245 00 a| MEMSh| [electronic resource] :b| a practical guide to design, analysis, and applications /c| edited by Jan G. Korvink and Oliver Paul.;

260 a| Norwich, NY :b| W. Andrew Pub. ;a| Heidelberg, Germany :b| Springer,;

300 a| xxv, 965 p. :b| ill. ;c| 24 cm.;

500 a| "Micro-electro-mechanical systems"--Cover.;

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Microelectromechanical systems.=| ^A424252;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Korvink, J. G.q| (Jan G.)?| UNAUTHORIZED;

700 1 a| Paul, Oliver.?| UNAUTHORIZED;

856 40 z| Full text available from eBook - Engineering pre-2007u| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fwww.sciencedirect.com%2Fscience%2Fbook%2F9780815514978;

856 40 z| Full text available from William Andrew Supplement: Complete 1995 - 2006u| https://go.openathens.net/redirector/ecu.edu?url=http%3A%2F%2Fwww.sciencedirect.com%2Fscience%2Fbook%2F9780815514978;

947 a| (OCoLC)ocm61362695;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 6596223;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6596223-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 7/18/2025x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6596223-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 7/18/2025x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6596223-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 7/18/2025x| EBOOKz| JERESOURCE;

MEMS a practical guide to design, analysis, and applications / edited by Jan G. Korvink and Oliver Paul.

Other author	Korvink, J. G. (Jan G.)
Other author	Paul, Oliver.
Format	Electronic
Publication Info	Norwich, NY : W. Andrew Pub. ; Heidelberg, Germany : Springer,
Description	xxv, 965 p. : ill. ; 24 cm.
Supplemental Content	Full text available from eBook - Engineering pre-2007
Supplemental Content	Full text available from William Andrew Supplement: Complete 1995 - 2006
Subjects	Microelectromechanical systems.

General note	"Micro-electro-mechanical systems"--Cover.
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2005023492
ISBN	0815514972 (William Andrew : alk. paper)
ISBN	3540211179 (Springer-Verlag)

MEMS a practical guide to design, analysis, and applications / edited by Jan G. Korvink and Oliver Paul.

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