Modeling of Film Deposition for Microelectronic Applications.
| Author/creator | Rossnagel, Stephen Editor |
| Format | Electronic |
| Publication Info | Academic Press [Imprint] San Diego : Elsevier Science & Technology Books |
| Description | 290 p. ill 22.900 x 015.200 cm. |
| Supplemental Content | Full text available from eBook - Materials Science pre-2007 |
| Subjects |
| Other author/creator | Ulman, Abraham Contribution by |
| Other author/creator | Francombe, Maurice H. Contribution by |
| Other author/creator | Vossen, John Editor |
| Other author/creator | Powell, Ronald Contribution by |
| Series | Advances in Research and Development Ser. |
| Summary | Annotation Physics of Thin Filmsis one of the longest running continuing series in thin film science, consisting of 22 volumes since 1963. The series contains quality studies of the properties of various thin filmsmaterials and systems.In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Filmsto Thin Films. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| ISBN | 9780125330220 |
| ISBN | 0125330227 (Trade Cloth) Out of Stock Indefinitely |
| Standard identifier# | 9780125330220 |
| Stock number | 00991439 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |