PVD for Microelectronics Vol. 26: Sputter Desposition to Semiconductor Manufacturing
| Author/creator | Powell, Ronald Author |
| Other author | Rossnagel, Stephen M. Contribution by |
| Other author | Ulman, Abraham Contribution by |
| Format | Electronic |
| Publication Info | Academic Press [Imprint] San Diego : Elsevier Science & Technology Books |
| Description | 419 p. ill 22.900 x 015.200 cm. |
| Supplemental Content | Full text available from eBook - Materials Science pre-2007 |
| Subjects |
| Summary | Annotation GENERAL DESCRIPTION OF THE SERIESPhysics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. GENERAL DESCRIPTION OF THE VOLUMEThis volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 98028495 |
| ISBN | 9780125330268 |
| ISBN | 012533026X (Trade Cloth) Out of Stock Indefinitely |
| Standard identifier# | 9780125330268 |
| Stock number | 00991439 |