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010 a| 2019003981;

020 a| 9781498779470 (hardback);

020 z| 9780429186738 (ebook);

020 z| 9780429532658q| ebook;

035 a| (WaSeSS)ssj0002158682;

040 a| DLCb| engc| DLCd| WaSeSS;

042 a| pcc;

049 a| EREEa| NEHH;

050 00 a| TK7874.58b| .O68 2019;

082 00 a| 670.42/52| 23;

245 00 a| Optical inspection of microsystemsh| [electronic resource] /c| edited by Wolfgang Osten.;

250 a| 2nd edition.;

260 a| Boca Raton :b| Taylor & Francis, CRC Press,c| [2019];

263 a| 1907;

300 a| pages cm;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Microelectromechanical systemsx| Inspection.=| ^A424252;

650 0 a| Quality controlx| Optical methods.=| ^A224945;

650 0 a| Optical measurements.=| ^A29826;

650 0 a| Industrial microscopy.?| UNAUTHORIZED;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Osten, Wolfgang.=| ^A250100;

856 40 z| Full text available from Taylor & Francis eBooksu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fwww.taylorfrancis.com%2Fbooks%2F9780429186738;

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999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6678983-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 12/19/2025x| EBOOKz| JERESOURCE;

Optical inspection of microsystems / edited by Wolfgang Osten.

Other author	Osten, Wolfgang.
Format	Electronic
Edition	2nd edition.
Publication Info	Boca Raton : Taylor & Francis, CRC Press, [2019]
Description	pages cm
Supplemental Content	Full text available from Taylor & Francis eBooks
Subjects	Microelectromechanical systems--Inspection. Quality control--Optical methods. Optical measurements. Industrial microscopy.

Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2019003981
ISBN	9781498779470 (hardback)
ISBN	ebook

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Optical inspection of microsystems / edited by Wolfgang Osten.

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