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001 ocm37207896;

003 OCoLC;

005 20141208174146.0;

007 he bmb024bbca;

008 970627s1995 mdua bb f000 0 eng d;

035 a| (Sirsi) o37207896;

035 a| (OCoLC)37207896;

043 a| n-us---;

049 a| ERE$;

074 a| 0247 (MF);

086 0 a| C 13.10:400-98;

100 1 a| Bullis, W. Murray,d| 1930-=| ^A434230;

245 10 a| Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /c| W. Murray Bullis, S. Perkowitz, D.G. Seiler.;

260 a| Gaithersburg, MD :b| U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,c| 1995.;

300 a| iv, 51 pages :b| illustrations ;c| 28 cm.;

336 a| text2| rdacontent;

337 a| microform2| rdamedia;

338 a| microfiche2| rdacarrier;

490 1 a| Semiconductor measurement technology;

490 1 a| NIST special publication ;v| 400-98;

500 a| Distributed to depository libraries in microfiche.;

500 a| Shipping list no.: 97-0518-M.;

500 a| Paper version no longer available for sale by the Supt. of Docs.;

500 a| "December 1995.";

504 a| Includes bibliographical references.;

650 0 a| Semiconductorsx| Testingx| Optical methods.=| ^A434231;

650 0 a| Semiconductorsx| Characterization.=| ^A434232;

650 0 a| Semiconductor industryz| United States.=| ^A162705;

700 1 a| Perkowitz, Sidney.=| ^A434233;

700 1 a| Seiler, David G.=| ^A434234;

710 2 a| National Institute of Standards and Technology (U.S.)=| ^A259859;

830 0 a| NIST special publicationv| 400-98.=| ^A390056;

830 0 a| Semiconductor measurement technology.=| ^A428054;

596 a| 1;

998 a| 690686;

999 a| C 13.10:400-98w| SUDOCc| 1i| MQ1299844d| 8/6/2007l| JDOMIm| JOYNERr| Ys| Yt| JDOFMIu| 1/23/1988x| MICROFORMz| JFEDDOCSo| .STAFF. 0;

Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry / W. Murray Bullis, S. Perkowitz, D.G. Seiler.

Author/creator	Bullis, W. Murray, 1930-
Other author	Perkowitz, Sidney.
Other author	Seiler, David G.
Other author	National Institute of Standards and Technology (U.S.)
Format	Microform
Publication Info	Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1995.
Description	iv, 51 pages : illustrations ; 28 cm.
Subjects	Semiconductors--Testing. --Optical methods. Semiconductors--Characterization. Semiconductor industry--United States.

Series	Semiconductor measurement technology NIST special publication ; 400-98 NIST special publication 400-98. ^A390056 Semiconductor measurement technology. ^A428054
General note	Distributed to depository libraries in microfiche.
General note	Shipping list no.: 97-0518-M.
General note	Paper version no longer available for sale by the Supt. of Docs.
General note	"December 1995."
Bibliography note	Includes bibliographical references.
Reproduction note	Joyner- Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative.
GPO item number	0247 (MF)
Govt. docs number	C 13.10:400-98

Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry / W. Murray Bullis, S. Perkowitz, D.G. Seiler.

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