Tools

LEADER 01623cam 2200421 i 4500

001 ocm02282299;

003 OCoLC;

005 20141212142235.0;

008 761108s1976 dcua b f000 0 eng ;

010 a| 76600032;

020 c| $1.45;

035 a| (Sirsi) o02282299;

035 a| (OCoLC)2282299;

049 a| ERE#;

050 00 a| QC100b| .U57 no. 400-22a| TK7871.85;

082 0 a| 602/.1 sa| 621.3815/2/028;

086 0 a| C 13.10:400-22;

100 1 a| Buehler, Martin G.=| ^A450736;

245 10 a| Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon /c| Martin G. Buehler.;

260 a| [Washington] :b| U.S. Dept. of Commerce, National Bureau of Standards :b| For sale by the Supt. of Docs., U.S. Govt. Print. Off,c| 1976.;

300 a| vi, 49 pages :b| illustrations ;c| 26 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| NBS special publication ;v| 400-22;

490 1 a| Semiconductor measurement technology;

504 a| Includes bibliographical references.;

650 0 a| Semiconductorsx| Testing.=| ^A65728;

650 0 a| Siliconx| Testing.=| ^A62410;

650 0 a| Microelectronics.=| ^A35901;

740 0 a| Microelectronic test pattern NBS-3 ...;

830 0 a| Semiconductor measurement technology.=| ^A428054;

830 0 a| NBS special publicationv| 400-22.=| ^A2701;

994 a| C0b| ERE;

596 a| 1;

998 a| 736993;

999 a| C 13.10:400-22w| SUDOCc| 1i| 30372013333809d| 6/8/2005l| JDOSm| JOYNERr| Ys| Yt| JDOSBKu| 6/3/2000x| BOOKz| JFEDDOCSo| .STAFF. 0;

Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon / Martin G. Buehler.

Author/creator	Buehler, Martin G.
Format	Book
Publication Info	[Washington] : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1976.
Description	vi, 49 pages : illustrations ; 26 cm.
Subjects	Semiconductors--Testing. Silicon--Testing. Microelectronics.

Series	NBS special publication ; 400-22 Semiconductor measurement technology Semiconductor measurement technology. ^A428054 NBS special publication 400-22. ^A2701
Bibliography note	Includes bibliographical references.
Other title	Microelectronic test pattern NBS-3 ...
LCCN	76600032
Govt. docs number	C 13.10:400-22

Library	Location	Call Number	Status	Item Actions
Joyner	Fed Docs Stacks	C 13.10:400-22	✔ Available	Place Hold

Click here for more information about this title