Tools

LEADER 01926cam 2200445 i 4500

001 ocm02073723;

003 OCoLC;

005 20141212142235.0;

008 760218s1976 dcua b f101 0 eng ;

010 a| 76608043;

019 a| 3243502;

035 a| (Sirsi) o02073723;

035 a| (OCoLC)2073723;

049 a| ERE#;

050 00 a| QC100b| .U57 no. 400-23a| TK7871.85;

082 00 a| 602/.1 sa| 621.3815/2;

086 0 a| C 13.10:400-23;

245 00 a| ARPA/NBS workshop IV :b| surface analysis for silicon devices /c| [edited by] A. George Lieberman.;

260 a| Washington :b| U.S. Dept. of Commerce, National Bureau of Standards :b| [For sale by the Supt. of Docs., Govt. Print. Off.],c| 1976.;

300 a| vii, 239 pages :b| illustrations ;c| 27 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Semiconductor measurement technology;

490 1 a| NBS special publication ;v| 400-23;

500 a| "Contains the proceedings of the ARPA/NBS workshop IV, Surface analysis for silicon devices, held at the National Bureau of Standards on April 23-24, 1975.";

504 a| Includes bibliographical references and index.;

650 0 a| Semiconductorsx| Testingv| Congresses.=| ^A1242422;

650 0 a| Siliconx| Testingv| Congresses.=| ^A62410;

650 0 a| Surfaces (Technology)x| Analysisv| Congresses.=| ^A216140;

650 0 a| Spectrum analysisv| Congresses.=| ^A585232;

700 1 a| Lieberman, A. Georgeq| (Alfred George),d| 1937-=| ^A450738;

710 1 a| United States.b| National Bureau of Standards.=| ^A44678;

830 0 a| Semiconductor measurement technology.=| ^A428054;

830 0 a| NBS special publicationv| 400-23.=| ^A2701;

994 a| C0b| ERE;

596 a| 1;

998 a| 736994;

999 a| C 13.10:400-23w| SUDOCc| 1i| 30372013333817d| 6/8/2005l| JDOSm| JOYNERr| Ys| Yt| JDOSBKu| 6/3/2000x| BOOKz| JFEDDOCSo| .STAFF. 0;

ARPA/NBS workshop IV : surface analysis for silicon devices / [edited by] A. George Lieberman.

Other author	Lieberman, A. George (Alfred George), 1937-
Other author	United States. National Bureau of Standards.
Format	Book
Publication Info	Washington : U.S. Dept. of Commerce, National Bureau of Standards : [For sale by the Supt. of Docs., Govt. Print. Off.], 1976.
Description	vii, 239 pages : illustrations ; 27 cm.
Subjects	Semiconductors--Testing. --Congresses. Silicon--Testing. --Congresses. Surfaces (Technology)--Analysis. --Congresses. Spectrum analysis--Congresses.

Series	Semiconductor measurement technology NBS special publication ; 400-23 Semiconductor measurement technology. ^A428054 NBS special publication 400-23. ^A2701
General note	"Contains the proceedings of the ARPA/NBS workshop IV, Surface analysis for silicon devices, held at the National Bureau of Standards on April 23-24, 1975."
Bibliography note	Includes bibliographical references and index.
LCCN	76608043
Govt. docs number	C 13.10:400-23

ARPA/NBS workshop IV : surface analysis for silicon devices / [edited by] A. George Lieberman.

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