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LEADER 01535cam 2200409 i 4500

001 ocm02814031;

003 OCoLC;

005 20141212142449.0;

008 770112s1977 dcua 000 0 eng ;

010 a| 76608408;

020 c| $1.35;

035 a| (Sirsi) o02814031;

035 a| (OCoLC)2814031;

049 a| ERE#;

050 00 a| QC100b| .U57 no. 400-24a| TK7882.S3;

082 00 a| 602/.1 sa| 621.3815/48;

086 0 a| C 13.10:400-24;

100 1 a| Sawyer, David E.=| ^A452445;

245 12 a| A laser scanner for semiconductor devices /c| David E. Sawyer and David W. Berning.;

260 a| Washington :b| U.S. Dept. of Commerce, National Bureau of Standards :b| For sale by the Supt. of Docs., U.S. Govt. Print. Off,c| 1977.;

300 a| vii, 64 pages :b| illustrations ;c| 27 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Semiconductor measurement technology;

490 1 a| NBS special publication ;v| 400-24;

650 0 a| Optical scanners.=| ^A132657;

650 0 a| Semiconductor industryx| Laser use in.=| ^A598130;

650 0 a| Semiconductorsx| Testing.=| ^A65728;

700 1 a| Berning, David W.e| author.=| ^A452446;

830 0 a| Semiconductor measurement technology.=| ^A428054;

830 0 a| NBS special publicationv| 400-24.=| ^A2701;

994 a| C0b| ERE;

596 a| 1;

998 a| 741548;

999 a| C 13.10:400-24w| SUDOCc| 1i| 30372013333825d| 6/8/2005l| JDOSm| JOYNERr| Ys| Yt| JDOSBKu| 6/3/2000x| BOOKz| JFEDDOCSo| .STAFF. 0;

A laser scanner for semiconductor devices / David E. Sawyer and David W. Berning.

Author/creator	Sawyer, David E.
Other author	Berning, David W. author.
Format	Book
Publication Info	Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1977.
Description	vii, 64 pages : illustrations ; 27 cm.
Subjects	Optical scanners. Semiconductor industry--Laser use in. Semiconductors--Testing.

Series	Semiconductor measurement technology NBS special publication ; 400-24 Semiconductor measurement technology. ^A428054 NBS special publication 400-24. ^A2701
LCCN	76608408
Govt. docs number	C 13.10:400-24

Library	Location	Call Number	Status	Item Actions
Joyner	Fed Docs Stacks	C 13.10:400-24	✔ Available	Place Hold

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