Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry / A.R. Heyd, S.A. Alterovitz, E.T. Croke.
| Author/creator | Heyd, A. R. |
| Other author | Alterovitz, S. A. |
| Other author | Croke, E. T. |
| Other author | United States. National Aeronautics and Space Administration. |
| Format | Book |
| Publication Info | [Washington, D.C.] : [National Aeronautics and Space Administration] ; [Springfield, Va.] : [National Technical Information Service, distributor], [1995] |
| Description | 1 volume. |
| Series | NASA-TM ; 112114 NASA technical memorandum 112114. ^A467613 |
| General note | Shipping list no.: 97-0960-M. |
| Reproduction note | Joyner- Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1995] 1 microfiche. |
| GPO item number | 0830-D (MF) |
| Govt. docs number | NAS 1.15:112114 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Microforms B300 | NAS 1.15:112114 | ✔ Available |