High resolution focused ion beams : FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology / Jon Orloff, Mark Utlaut, and Lynwood Swanson.
| Author/creator | Orloff, Jon |
| Other author | Swanson, Lynwood, 1934- |
| Other author | Utlaut, Mark William, 1949- |
| Format | Book |
| Publication Info | New York : Kluwer Academic/Plenum Publishers, ©2003. |
| Description | x, 303 pages : illustrations ; 26 cm |
| Subjects |
| Bibliography note | Includes bibliographical references and index. |
| LCCN | 2002028661 |
| ISBN | 030647350X |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | General Stacks | QC702.7.B65 O75 2003 | ✔ Available | Place Hold |