Semiconductor microelectronics and nanoelectronics programs / edited by Stephen Knight, Joaquin V. Martinez de Pinillos, and Michele Buckley.
| Format | Microform |
| Publication Info | [Gaithersburg, MD] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2003] |
| Description | vii, 168 pages : illustrations ; 28 cm. |
| Supplemental Content | https://purl.fdlp.gov/GPO/LPS42647 |
| Subjects |
| Other author/creator | Knight, Stephen. |
| Other author/creator | Pinillos, Joaquin V. Martinez de. |
| Other author/creator | Buckley, Michele. |
| Other author/creator | National Institute of Standards and Technology (U.S.) |
| Series | NISTIR ; 7010 NISTIR ; 7010. ^A682451 |
| General note | "July 2003." |
| General note | Shipping list no.: 2004-0094-M. |
| Bibliography note | Includes bibliographical references. |
| Other forms | Also available via Internet from the NIST web site. Address as of 1/22/04: http://www.eeel.nist.gov/omp/Portfolio%202003/F%5Fomp.pdf; current access is available via PURL. |
| Reproduction note | Joyner- Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2003 2 microfiches : negative. |
| GPO item number | 0247-D (MF) |
| GPO item number | 0247-D (online) |
| Govt. docs number | C 13.58:7010 |