Semiconductor microelectronics and nanoelectronics programs / edited by Stephen Knight, Joaquin V. Martinez de Pinillos, and Michele Buckley.

Format Microform
Publication Info[Gaithersburg, MD] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2003]
Descriptionvii, 168 pages : illustrations ; 28 cm.
Supplemental Contenthttps://purl.fdlp.gov/GPO/LPS42647
Subjects

Other author/creatorKnight, Stephen.
Other author/creatorPinillos, Joaquin V. Martinez de.
Other author/creatorBuckley, Michele.
Other author/creatorNational Institute of Standards and Technology (U.S.)
SeriesNISTIR ; 7010
NISTIR ; 7010. ^A682451
General note"July 2003."
General noteShipping list no.: 2004-0094-M.
Bibliography noteIncludes bibliographical references.
Other formsAlso available via Internet from the NIST web site. Address as of 1/22/04: http://www.eeel.nist.gov/omp/Portfolio%202003/F%5Fomp.pdf; current access is available via PURL.
Reproduction noteJoyner- Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2003 2 microfiches : negative.
GPO item number0247-D (MF)
GPO item number0247-D (online)
Govt. docs number C 13.58:7010