Handbook of infrared spectroscopy of ultrathin films / Valeri P. Tolstoy, Irina V. Chernyshova, Valeri A. Skryshevsky.

Author/creator Tolstoy, Valeri P.
Other author Chernyshova, Irina V.
Other author Skryshevsky, Valeri A.
Format Book
Publication InfoHoboken, N.J. : Wiley-Interscience, ©2003.
Descriptionxxiv, 710 pages : illustrations ; 25 cm
Subjects

Contents Absorption and Reflection of Infrared Radiation by.Ultrathin Films -- Optimum Conditions for Recording Infrared Spectra of Ultrathin Films -- Interpretation of IR Spectra of Ultrathin Films -- Equipment and Techniques -- Infrared Spectroscopy of Thin Layers in Silicon Microelectronics -- Application of Infrared Spectroscopy to Analysis of Interfaces and Thin Dielectric Layers in Semiconductor Technology -- Ultrathin Films at Gas?Solid, Gas?Liquid, and Solid?Liquid Interfaces.
Bibliography noteIncludes bibliographical references and index.
LCCN 2001007192
ISBN047135404X (alk. paper)

Availability

Library Location Call Number Status Item Actions
Joyner General Stacks QC176.84.O7 T65 2003 ✔ Available Place Hold