ARPA/NBS workshop I: measurement problems in integrated circuit processing and assembly / [by] Harry A. Schafft.
| Author/creator | Schafft, Harry A. |
| Format | Book |
| Publication Info | [Washington] : U.S. National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.], 1974. |
| Description | iv, 18 pages ; 26 cm. |
| Subjects |
| Series | Semiconductor measurement technology NBS Special publication ; 400-3 Semiconductor measurement technology. ^A428054 NBS special publication 400-3. ^A2701 |
| General note | "A United States Department of Commerce publication." |
| General note | "CODEN: XNBSAV." |
| LCCN | 74600001 |
| Govt. docs number | C 13.10:400-3 |