Microelectronic test patterns : an overview / [by] Martin G. Buehler.
| Author/creator | Buehler, Martin G. |
| Other author | United States. Defense Advanced Research Projects Agency. |
| Other author | United States. Defense Nuclear Agency. |
| Other author | United States. National Bureau of Standards. |
| Format | Book |
| Publication Info | [Washington] : National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.], 1974. |
| Description | 19 pages : illustrations ; 26 cm. |
| Subjects |
| Series | NBS special publication 400-6 Semiconductor measurement technology Semiconductor measurement technology. ^A428054 NBS special publication 400-6. UNAUTHORIZED |
| General note | "Jointly sponsored by the Defense Advanced Research Projects Agency, the Defense Nuclear Agency, and the National Bureau of Standards." |
| Bibliography note | Bibliography: p. 11. |
| LCCN | 74013001 |
| Govt. docs number | C 13.10:400-6 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Fed Docs Stacks | C 13.10:400-6 | ✔ Available | Place Hold |