Laser scanning of active semiconductor devices--videotape script / David E. Sawyer and David W. Berning.
| Author/creator | Sawyer, David E. |
| Other author | Berning, David W. author. |
| Format | Book |
| Publication Info | Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1976. |
| Description | iii, 21 pages : illustrations ; 26 cm. |
| Subjects |
| Series | Semiconductor measurement technology NBS special publication ; 400-27 Semiconductor measurement technology. ^A428054 NBS special publication 400-27. ^A2701 |
| General note | "This activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards." |
| LCCN | 75619427 |
| Govt. docs number | C 13.10:400-27 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Fed Docs Stacks | C 13.10:400-27 | ✔ Available | Place Hold |