Techniques for measuring the integrity of passivation overcoats on integrated circuits / Werner Kern and Robert B. Comizzoli.
| Author/creator | Kern, Werner, 1925- |
| Other author | Comizzoli, Robert B., author. |
| Format | Book |
| Publication Info | Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1977. |
| Description | xiv, 105 pages : illustrations ; 26 cm. |
| Subjects |
| Series | Semiconductor measurement technology National Bureau of Standards special publication ; 400-31 Semiconductor measurement technology. ^A428054 NBS special publication 400-31. ^A2701 |
| Bibliography note | Includes bibliographical references. |
| LCCN | 76608229 |
| Govt. docs number | C 13.10:400-31 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Fed Docs Stacks | C 13.10:400-31 | ✔ Available | Place Hold |