Microelectronic test pattern NBS-4 / W. Robert Thurber and Martin G. Buehler.
| Author/creator | Thurber, W. Robert |
| Other author | Buehler, Martin G. |
| Format | Book |
| Publication Info | Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1978. |
| Description | vi, 83 pages : illustrations ; 26 cm. |
| Subjects |
| Series | Semiconductor measurement technology NBS special publication ; 400-32 Semiconductor measurement technology. ^A428054 NBS special publication 400-32. ^A2701 |
| General note | "This activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards." |
| Bibliography note | Includes bibliographical references. |
| LCCN | 78606024 |
| Govt. docs number | C 13.10:400-32 |