Automated photomask inspection / Donald B. Novotny and Dino R. Ciarlo.
| Author/creator | Novotny, Donald B. |
| Other author | Ciarlo, Dino R., author. |
| Format | Book |
| Publication Info | Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1978. |
| Description | vi, 31 pages : illustrations ; 26 cm. |
| Subjects |
| Series | Semiconductor measurement technology NBS special publication ; 400-46 Semiconductor measurement technology. ^A428054 NBS special publication 400-46. ^A2701 |
| Bibliography note | Includes bibliographical references. |
| LCCN | 78606023 |
| Govt. docs number | C 13.10:400-46 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Fed Docs Stacks | C 13.10:400-46 | ✔ Available | Place Hold |