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001 ocm04482406;

003 OCoLC;

005 20141212182332.0;

008 780908s1978 dcua b f000 0 eng ;

010 a| 78010624;

019 a| 4496097a| 20547514;

035 a| (Sirsi) o04482406;

035 a| (OCoLC)4482406;

049 a| ERE#;

050 00 a| QC100b| .U57 no. 400-49a| TK7871.85;

082 00 a| 602/.1 sa| 621.3815/2/028;

086 0 a| C 13.10:400-49;

245 00 a| Angular sensitivity of controlled implanted doping profiles /c| Robert G. Wilson [and others].;

260 a| [Washington] :b| U.S. Dept. of Commerce, National Bureau of Standards :b| For sale by the Supt. of Doc., U.S. Govt. Print. Off,c| 1978.;

300 a| vii, 54 pages :b| illustrations ;c| 26 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Semiconductor measurement technology;

490 1 a| NBS special publication ;v| 400-49;

504 a| Includes bibliographical references.;

650 0 a| Semiconductor doping.=| ^A142636;

650 0 a| Ion implantation.=| ^A44637;

650 0 a| Integrated circuits.=| ^A42814;

700 1 a| Wilson, Robert G.=| ^A44636;

830 0 a| Semiconductor measurement technology.=| ^A428054;

830 0 a| NBS special publicationv| 400-49.=| ^A2701;

994 a| C0b| ERE;

596 a| 1;

998 a| 997979;

999 a| C 13.10:400-49w| SUDOCc| 1i| 30372013334005d| 6/8/2005l| JDOSm| JOYNERr| Ys| Yt| JDOSBKu| 6/8/2005x| BOOKz| JFEDDOCSo| .STAFF. 0;

Angular sensitivity of controlled implanted doping profiles / Robert G. Wilson [and others].

Other author	Wilson, Robert G.
Format	Book
Publication Info	[Washington] : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Doc., U.S. Govt. Print. Off, 1978.
Description	vii, 54 pages : illustrations ; 26 cm.
Subjects	Semiconductor doping. Ion implantation. Integrated circuits.

Series	Semiconductor measurement technology NBS special publication ; 400-49 Semiconductor measurement technology. ^A428054 NBS special publication 400-49. ^A2701
Bibliography note	Includes bibliographical references.
LCCN	78010624
Govt. docs number	C 13.10:400-49

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