"Integrated circuits+Masks.+Measurement." - ECU Libraries Catalog

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Cover image for Accurate linewidth measurement on integrated-circuit photomasks

Accurate linewidth measurement on integrated-circuit photomasks

1980
Format: Book

Joyner Library - Fed Docs Stacks

Call Number: C 13.10:400-43

Cover image for Measurement assurance for dimensional measurements on integrated-circuit photomasks

Measurement assurance for dimensional measurements on integrated-circuit photomasks

by Croarkin, Carroll
1982
Format: Microform

Joyner Library - Microforms B300

Call Number: C 13.46:1164

Cover image for Optical and dimensional-measurement problems with photomasking in microelectronics

Optical and dimensional-measurement problems with photomasking in microelectronics

by Jerke, John M.
1975
Format: Book

Joyner Library - Fed Docs Stacks

Call Number: C13.10:400-20

Cover image for Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems

by Potzick, James E.
1997
Format: Microform

Joyner Library - Microforms B300

Call Number: C 13.10:260-129