"Microelectromechanical systems+Measurement." - ECU Libraries Catalog

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Cover image for Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology

2011
Format: Electronic

Location
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Cover image for Characterization of polymer-coated MEMS humidity sensors for flight applications

Characterization of polymer-coated MEMS humidity sensors for flight applications

2005
Format: Electronic

Location
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Cover image for Optical inspection of microsystems

Optical inspection of microsystems

2019
2nd edition
Format: Electronic

Location
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Cover image for Novel on-wafer radiation pattern measurement technique for MEMS actuator based reconfigurable patch antennas

Novel on-wafer radiation pattern measurement technique for MEMS actuator based reconfigurable patch antennas

by Simons, Rainee, 1949-
2003
Format: Microform

Location	Call #	Status
Joyner - Microforms B300	NAS 1.15:2003-211816	✔ Available