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Smart MEMS and sensor systems
by
Gaura, Elena
2006
Format:
Electronic
Location
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Microelectromechanical system (MEMS) switch test
by
Karter, Stanley
2011
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Electronic
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Fundamentals of microfabrication and nanotechnology. from MEMS to bio-MEMS and bio-NEMS
by
Madou, Marc J.
2011
Third edition
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Electronic
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MEMS for automotive and aerospace applications
2013
Format:
Electronic
Location
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Enabling Technologies for MEMS and Nanodevices
by
Baltes, Henry
2004
Format:
Electronic
Location
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Micro electro mechanical systems (MEMS)
2010
Format:
Electronic
Location
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Adhesion aspects in MEMS/NEMS
2010
Format:
Electronic
Location
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MEMS Applications in Biology and Healthcare
by
Basu
2021
Format:
Electronic
Location
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Design, test, integration and packaging of MEMS/MOEMS
by
Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS
1995
Format:
Electronic
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NEMS/MEMS technology and devices
by
International Conference on Materials for Advanced Technologies
2011
Format:
Electronic
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