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Cover image for Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

  • 2015
  • Second edition
  • Format: Electronic
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Cover image for Introduction to micromechanisms and microactuators

Introduction to micromechanisms and microactuators

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Joyner - General Stacks TK7875 .G56 2015 ✔ Available
Cover image for Thermal characterization of thin films for MEMS applications

Thermal characterization of thin films for MEMS applications

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Cover image for A piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films

A piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films

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Cover image for Design and fabrication of a strain-powered microelectromechanical system (MEMS) switch

Design and fabrication of a strain-powered microelectromechanical system (MEMS) switch

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Cover image for Parametric approach to determining the optimum geometry for PZT MEMS switches intended for digital applications

Parametric approach to determining the optimum geometry for PZT MEMS switches intended for digital applications

  • 2010
  • Format: Electronic
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Cover image for Fabrication and testing of a novel MEMS rotational thermal actuator

Fabrication and testing of a novel MEMS rotational thermal actuator

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Cover image for MEMS length and strain measurements using an optical interferometer

MEMS length and strain measurements using an optical interferometer

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Joyner - Microforms B300 C 13.58:6779 ✔ Available
Cover image for Numerical simulation of mechatronic sensors and actuators

Numerical simulation of mechatronic sensors and actuators

Location Call # Status
Joyner - General Stacks TK7875 .K35 2004 ✔ Available
Cover image for Electrochemical micromachining for nanofabrication, MEMS and nanotechnology

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology

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